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WP0
- Project Management
- Manage specification table
- Manage Dissemination
WP1
- Design & build Material Pilot Line
- Define & Implement SPC
- Deliver Optimized Materials
- Deliver high Xi material
WP2
- Polymer Characterization
- Pattern Characterization
- Theoretical & Statistical studies (material/perf correlation)
WP3
- Implement DSA material on 300mm CMOS line
- Implement SPC on CMOS line
- Define Lithography process
- Define integration schemes
- Develop new DSA in line metrology
WP4
- Define end-User requirements
- Assess and Benchmark DSA processes
- Qualify 1St compact Modelling solution
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