WP0

• Project Management
• Manage specification table
• Manage Dissemination

WP1

• Design & build Material Pilot Line
• Define & Implement SPC
• Deliver Optimized Materials
• Deliver high Xi material

WP2

• Polymer Characterization
• Pattern Characterization
• Theoretical & Statistical studies (material/perf correlation)

WP3

• Implement DSA material on 300mm CMOS line
• Implement SPC on CMOS line
• Define Lithography process
• Define integration schemes
• Develop new DSA in line metrology

WP4

• Define end-User requirements
• Assess and Benchmark DSA processes
• Qualify 1St compact Modelling solution